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蔡小海：
aerotech als135 linear motor stageals135直線電機平臺采用了中央驅動，無齒槽直線電機和長壽命的非接觸線性編碼器。運動磁軌設計消除了運動電纜管理的需要。
行程：200 mm定位精度：±0.3 μm負載：12 kg
als135 性能指標direct-drive linear motor forultra-precisemotion
high-accuracy noncontact linear encoder
outstanding performance in asmallfootprint
the als135, with its low profile and outstandingperformancecharacteristics, is the ultimate solution forhigh-accuracyalignment and inspection stations.
linear motor driveunlike many stages that utilize a side-drive lead screw, theals135employs a center-driven, non-cogging linear motor as thedrivingelement. since the linear motor is a direct-drive device,there isno backlash, windup, or 搒tiction?that is normallyassociated with alead screw or ball screw drive.
the linear motor drive also offers the advantage of higherspeedsand accelerations. the compact yet powerful linear motordrives theals135 to a peak unloaded acceleration of 1 g and amaximumvelocity of 300 mm/s. the result is a high-accuracy devicewithoutstanding throughput that significantly outperformscomparablehigh-accuracy screw-driven stages.
outstanding resolutionfor alignment applications, outstanding step-to-step resolutioniscritical. the als135 meets this demand with a resolution of 10nmwhen coupled with aerotech controls. the direct-drive linearmotorallows the als135 to make precise, small resolution steps.this isparticularly important in alignment applications wherestepaccuracy is critical.
superior geometryaerotech's ultra-stiff construction and compact two-piecedesignresults in a stage with unmatched geometrical tolerances. asaresult, straightness and flatness for the standard stageis2μmover the entire travel. the effects of abbe error arenearlyeliminated, vastly improving overallsystemaccuracy.
smooth traveldesigned for smooth, vibration-free motion, the als135 exhibitstheoutstanding ripple-free motion required for scanning andinspectionapplications.
designed for long lifelike all stages in the aerotech product family, the als135wasdesigned for outstanding long-term performance. both thelinearmotor and linear encoder are noncontact devices ?they notonlyexhibit long-life, but are totally maintenance free. amovingmagnet track design eliminates the need for cablemanagement,further improving long-term reliability.
precision alignmentals135 series stages are easily configured as xy assemblies.optionsinclude precision orthogonality alignment to 5 arc secondsandavailable vertical axis solutions.
notes:???????1. maximum speed based on stage capability. maximumapplicationvelocity may be limited by system data rate andsystemresolution.???????2. maximum load based on bearing capability. maximumapplicationload may be limited byaccelerationrequirements.???????3. value with aerotech controls andhaloption.???????4. specifications are for single-axis systems, measured 50 mmabovethe tabletop. performance of multi-axis systems is payloadandworkpoint dependent. consult factory for multi-axis ornon-standardapplications.

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北京奧控科技有限公司
蔡小海
18501362844
立湯路188號北方明珠大廈1號樓23層

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